Nkọwapụta | LMT-XY-200X200 | ABVT-Z20 (ụgbọ okporo ígwè na-ebu ikuku) |
Ụdị moto | Igwe anaghị agba nchara nke agba atọ | moto eriri igwe olu+ |
Mkpebi | Ọnụọgụ dijitalụ 100nm nke ọma | 1vpp ruo 5nm |
Ntụnye moto | Na-aga n'ihu 60N/elu 210N | Na-aga n'ihu 60N/elu 210N |
Nha nzọụkwụ kacha nta[nm] | 200nm | 100nm |
Njem [mm] | 200×200 | 10 |
Nkwagharị ọzọ [um] | ±0.3 | |
Izi ezi ọnọdụ [um] | ±1 | ±0,5 |
Ọkụkụ [um] | 10um | 5um |
Izi ezi [um] | 1um | 1um |
Ọsọ kacha [mm/s] | 500mm / s | 30mm / s |
Ike ibu [kg] | 5kg (Z axis na pneumatic mgbe niile ike itule ibu) |